Ellipsometriya S Binarnoy Modulyatsiey Sostoyaniya Polyarizatsii

Razvivaetsya predlozhennoe avtorom v kontse semidesyatykh godov proshlogo veka novoe napravlenie v ellipsometrii – ellipsometriya s binarnoy modulyatsiey sostoyaniya polyarizatsii. Privedeno opisanie razrabotannykh avtorami metodov izmereniy i original’nykh ustroystv polyarizatsionnoy optiki -binarnykh modulyatorov sostoyaniya polyarizatsii i soosnykh akhromaticheskikh kompensatorov. Predstavleny rezul’taty nekotorykh issledovaniy, vypolnennykh na sozdannykh na ikh osnove pretsizionnykh spektral’nykh ellipsometrakh s binarnoy modulyatsiey sostoyaniya polyarizatsii. Otmechaetsya perspektivnost’ shirokodiapazonnykh skaniruyushchikh i mnogokanal’nykh svetodiodnykh spektral’nykh ellipsometrov s binarnoy modulyatsiey. Monografiya mozhet stat’ rukovodstvom pri vybore polyarizatsionnykh elementov, metodov i skhem ellipsometricheskikh izmereniy. Prednaznachena dlya nauchnykh rabotnikov, aspirantov, studentov sootvetstvuyushchikh spetsial’nostey. Tabl. 3. Ris. 59. Bibliogr.: 101 nazv. Kovalev Vitaliy Ivanovich, zakonchil MFTI v 1966 g., Doktor Tekhnicheskikh nauk, vedushchiy nauchnyy sotrudnik FIRE RAN, g. Fryazino, MO.